JPH062268Y2 - カセット搬送装置のカセット検知装置 - Google Patents
カセット搬送装置のカセット検知装置Info
- Publication number
- JPH062268Y2 JPH062268Y2 JP2139988U JP2139988U JPH062268Y2 JP H062268 Y2 JPH062268 Y2 JP H062268Y2 JP 2139988 U JP2139988 U JP 2139988U JP 2139988 U JP2139988 U JP 2139988U JP H062268 Y2 JPH062268 Y2 JP H062268Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- arm
- rod
- support shaft
- block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims description 23
- 238000005260 corrosion Methods 0.000 claims description 7
- 230000007797 corrosion Effects 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139988U JPH062268Y2 (ja) | 1988-02-19 | 1988-02-19 | カセット搬送装置のカセット検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139988U JPH062268Y2 (ja) | 1988-02-19 | 1988-02-19 | カセット搬送装置のカセット検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01125548U JPH01125548U (en]) | 1989-08-28 |
| JPH062268Y2 true JPH062268Y2 (ja) | 1994-01-19 |
Family
ID=31238606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2139988U Expired - Lifetime JPH062268Y2 (ja) | 1988-02-19 | 1988-02-19 | カセット搬送装置のカセット検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062268Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2531910Y2 (ja) * | 1992-03-31 | 1997-04-09 | 株式会社スガイ | 物品把持装置 |
| WO2011141960A1 (ja) * | 2010-05-12 | 2011-11-17 | ムラテックオートメーション株式会社 | 自動倉庫及び移載方法 |
-
1988
- 1988-02-19 JP JP2139988U patent/JPH062268Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01125548U (en]) | 1989-08-28 |
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